Assignee
GENISYS GMBH
DE·2 granted patents·5 citations·filing 2015–2017
Top patents by PatentIndex Score
2 records- 0171US10409946B2Process artefact compensation upon transfer of a mask layout onto a mask substrateGENISYS GMBH·Filed 2015·Granted Sep 10, 2019·4 cites·10 claims
- 0266US10401737B2Process dose and process bias determination for beam lithographyGENISYS GMBH·Filed 2017·Granted Sep 3, 2019·1 cites·15 claims
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