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GENITECH INC
KR4 patents
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US6720262B2Apr 13, 2004
Method of forming copper interconnections and thin films using chemical vapor deposition with catalyst
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Chemical deposition reactor and method of forming a thin film using the same
GENITECH INC503 citations98
US6645574B1Nov 11, 2003
Method of forming a thin film
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US6380081B1Apr 30, 2002
Method of vaporizing liquid sources and apparatus therefor
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