Assignee

GENTISCHER JOSEF

DE·1 granted patent·46 citations·filing 1992–1992

Technology mixB01L1 F24F1 H10P1 Y10S1

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0165US5628683ASystem for transferring substrates into clean roomsGENTISCHER JOSEF·Filed 1992·Granted May 13, 1997·46 cites·26 claims

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