Assignee
GEORGE GREGORY
US9 patents
Top patents by PatentIndex Score
US8551291B2Oct 8, 2013
Debonding equipment and methods for debonding temporary bonded wafers
GEORGE GREGORY16 citations92
US8267143B2Sep 18, 2012
Apparatus for mechanically debonding temporary bonded semiconductor wafers
GEORGE GREGORY23 citations90
US8147630B2Apr 3, 2012
Method and apparatus for wafer bonding with enhanced wafer mating
GEORGE GREGORY19 citations84
US8139219B2Mar 20, 2012
Apparatus and method for semiconductor wafer alignment
GEORGE GREGORY15 citations84
US8764026B2Jul 1, 2014
Device for centering wafers
GEORGE GREGORY8 citations79
US8425715B2Apr 23, 2013
Apparatus for high throughput wafer bonding
GEORGE GREGORY3 citations62
US8919412B2Dec 30, 2014
Apparatus for thermal-slide debonding of temporary bonded semiconductor wafers
GEORGE GREGORY3 citations60
US8574398B2Nov 5, 2013
Apparatus and method for detaping an adhesive layer from the surface of ultra thin wafers
GEORGE GREGORY1 citations52
US9064686B2Jun 23, 2015
Method and apparatus for temporary bonding of ultra thin wafers
GEORGE GREGORY1 citations49