Assignee
GHINOVKER MARK
IL·5 granted patents·123 citations·filing 2007–2012
Top patents by PatentIndex Score
5 records- 0197US8330281B2Overlay marks, methods of overlay mark design and methods of overlay measurementsGHINOVKER MARK·Filed 2007·Granted Dec 11, 2012·43 cites·9 claims
- 0297US8138498B2Apparatus and methods for determining overlay of structures having rotational or mirror symmetryGHINOVKER MARK·Filed 2009·Granted Mar 20, 2012·60 cites·11 claims
- 0394US8513822B1Thin overlay mark for imaging based metrologyGHINOVKER MARK·Filed 2010·Granted Aug 20, 2013·10 cites·25 claims
- 0485US9182680B2Apparatus and methods for determining overlay of structures having rotational or mirror symmetryGHINOVKER MARK·Filed 2012·Granted Nov 10, 2015·4 cites·22 claims
- 0581US8781211B2Rotational multi-layer overlay marks, apparatus, and methodsGHINOVKER MARK·Filed 2011·Granted Jul 15, 2014·6 cites·23 claims
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