Assignee
GIGAPHOTON INC
JP·453 granted patents·252 pending applications·802 citations·filing 2001–2025
Top patents by PatentIndex Score
705 records- 0197US9131589B2Extreme ultraviolet light generation apparatus and control method for laser apparatus in extreme ultraviolet light generation systemGIGAPHOTON INC·Filed 2014·Granted Sep 8, 2015·23 cites·4 claims
- 0295US12111577B2Line narrowing device, electronic device manufacturing methodGIGAPHOTON INC·Filed 2022·Granted Oct 8, 2024·2 cites·20 claims
- 0395US10932350B2Extreme ultraviolet light generation systemGIGAPHOTON INC·Filed 2019·Granted Feb 23, 2021·4 cites·19 claims
- 0495US7271401B2Extreme ultra violet light source deviceGIGAPHOTON INC·Filed 2005·Granted Sep 18, 2007·60 cites·12 claims
- 0594US12300962B2Laser device and electronic device manufacturing methodGIGAPHOTON INC·Filed 2023·Granted May 13, 2025·1 cites·20 claims
- 0694US12109648B2Laser annealing apparatus and method for manufacturing electronic deviceGIGAPHOTON INC·Filed 2021·Granted Oct 8, 2024·2 cites·20 claims
- 0794US10172225B2Extreme ultraviolet light generation apparatusGIGAPHOTON INC·Filed 2018·Granted Jan 1, 2019·5 cites·7 claims
- 0894US10038295B2Gas laser apparatusGIGAPHOTON INC·Filed 2017·Granted Jul 31, 2018·6 cites·14 claims
- 0994US9986629B2Extreme ultraviolet light generation apparatusGIGAPHOTON INC·Filed 2016·Granted May 29, 2018·5 cites·8 claims
- 1094US9888555B2Transmission system for transmitting pulse laser beam to extreme ultraviolet light chamber, and laser systemGIGAPHOTON INC·Filed 2017·Granted Feb 6, 2018·7 cites·11 claims
- 1194US7999241B2Extreme ultraviolet light source apparatusGIGAPHOTON INC·Filed 2009·Granted Aug 16, 2011·40 cites·12 claims
- 1293US12438333B2Line narrowing gas laser device, wavelength control method, and electronic device manufacturing methodGIGAPHOTON INC·Filed 2022·Granted Oct 7, 2025·1 cites·20 claims
- 1393US12237640B2Line narrowing device and electronic device manufacturing methodGIGAPHOTON INC·Filed 2022·Granted Feb 25, 2025·1 cites·5 claims
- 1493US9711934B2Laser apparatusGIGAPHOTON INC·Filed 2016·Granted Jul 18, 2017·7 cites·20 claims
- 1593US9509115B2System and method for generating extreme ultraviolet light, and laser apparatusGIGAPHOTON INC·Filed 2015·Granted Nov 29, 2016·5 cites·14 claims
- 1693US9130345B2System and method for generating extreme ultraviolet light, and laser apparatusGIGAPHOTON INC·Filed 2014·Granted Sep 8, 2015·10 cites·4 claims
- 1792US11764541B2Laser system and method for manufacturing electronic deviceGIGAPHOTON INC·Filed 2021·Granted Sep 19, 2023·3 cites·20 claims
- 1892US10303061B2Extreme ultraviolet light generation deviceGIGAPHOTON INC·Filed 2018·Granted May 28, 2019·5 cites·20 claims
- 1992US6987279B2Light source device and exposure equipment using the sameGIGAPHOTON INC·Filed 2004·Granted Jan 17, 2006·67 cites·16 claims
- 2091US11804697B2Laser system and electronic device manufacturing methodGIGAPHOTON INC·Filed 2021·Granted Oct 31, 2023·2 cites·20 claims
- 2191US11229112B2Extreme ultraviolet light generation apparatus, target control method, and electronic device manufacturing methodGIGAPHOTON INC·Filed 2021·Granted Jan 18, 2022·2 cites·20 claims
- 2291US10340654B2Laser apparatus and extreme ultraviolet light generating systemGIGAPHOTON INC·Filed 2018·Granted Jul 2, 2019·6 cites·12 claims
- 2391US9929529B2Solid-state laser system and laser apparatus used for exposure apparatusGIGAPHOTON INC·Filed 2017·Granted Mar 27, 2018·6 cites·18 claims
- 2491US9742141B2Laser chamberGIGAPHOTON INC·Filed 2016·Granted Aug 22, 2017·6 cites·6 claims
- 2591US9722384B2Gas laser apparatusGIGAPHOTON INC·Filed 2016·Granted Aug 1, 2017·4 cites·4 claims
- 2691US8957356B2System and method for generating extreme ultraviolet lightGIGAPHOTON INC·Filed 2012·Granted Feb 17, 2015·8 cites·13 claims
- 2791US2026018848A1Maintenance methodGIGAPHOTON INC·Filed 2025·Application pending·0 cites
- 2890US11025026B2Laser systemGIGAPHOTON INC·Filed 2019·Granted Jun 1, 2021·4 cites·5 claims
- 2990US9167678B2System and method for generating extreme ultraviolet lightGIGAPHOTON INC·Filed 2014·Granted Oct 20, 2015·8 cites·16 claims
- 3090US8003963B2Extreme ultraviolet light source apparatusGIGAPHOTON INC·Filed 2009·Granted Aug 23, 2011·21 cites·23 claims
- 3190US7903715B2Slab type laser apparatusGIGAPHOTON INC·Filed 2009·Granted Mar 8, 2011·13 cites·11 claims
- 3289US10136510B2Extreme ultraviolet light generation deviceGIGAPHOTON INC·Filed 2017·Granted Nov 20, 2018·4 cites·14 claims
- 3389US10102938B2Extreme ultraviolet light generating apparatusGIGAPHOTON INC·Filed 2018·Granted Oct 16, 2018·5 cites·20 claims
- 3489US10074956B2System and method for generating extreme ultraviolet light, and laser apparatusGIGAPHOTON INC·Filed 2016·Granted Sep 11, 2018·3 cites·8 claims
- 3589US9812841B2LasersystemGIGAPHOTON INC·Filed 2016·Granted Nov 7, 2017·5 cites·15 claims
- 3688US11409027B2Extreme ultraviolet light condensation mirror, extreme ultraviolet light generation apparatus, and electronic device manufacturing methodGIGAPHOTON INC·Filed 2020·Granted Aug 9, 2022·2 cites·26 claims
- 3788US11067907B2Target supply device, extreme ultraviolet light generating apparatus, and electronic device manufacturing methodGIGAPHOTON INC·Filed 2020·Granted Jul 20, 2021·2 cites·18 claims
- 3888US10268118B2Extreme ultraviolet light generating apparatusGIGAPHOTON INC·Filed 2018·Granted Apr 23, 2019·3 cites·8 claims
- 3988US10085334B2Extreme ultraviolet light generating systemGIGAPHOTON INC·Filed 2018·Granted Sep 25, 2018·3 cites·20 claims
- 4088US9882343B2Narrow band laser apparatusGIGAPHOTON INC·Filed 2017·Granted Jan 30, 2018·5 cites·12 claims
- 4188US9667019B2Laser apparatus and extreme ultraviolet light generation systemGIGAPHOTON INC·Filed 2015·Granted May 30, 2017·4 cites·11 claims
- 4288US8710475B2Extreme ultraviolet light source device and method for generating extreme ultraviolet lightGIGAPHOTON INC·Filed 2013·Granted Apr 29, 2014·7 cites·9 claims
- 4388US7923705B2Extreme ultra violet light source apparatusGIGAPHOTON INC·Filed 2009·Granted Apr 12, 2011·25 cites·30 claims
- 4487US12105425B2Exposure method, exposure system, and method for manufacturing electronic devicesGIGAPHOTON INC·Filed 2022·Granted Oct 1, 2024·1 cites·20 claims
- 4587US11682877B2Laser systemGIGAPHOTON INC·Filed 2021·Granted Jun 20, 2023·1 cites·12 claims
- 4687US11217962B2Laser systemGIGAPHOTON INC·Filed 2019·Granted Jan 4, 2022·4 cites·4 claims
- 4787US10630042B2System and method for generating extreme ultraviolet light, and laser apparatusGIGAPHOTON INC·Filed 2018·Granted Apr 21, 2020·2 cites·18 claims
- 4887US10225918B2Extreme ultraviolet light generating apparatusGIGAPHOTON INC·Filed 2018·Granted Mar 5, 2019·3 cites·14 claims
- 4987US10074958B2Laser systemGIGAPHOTON INC·Filed 2016·Granted Sep 11, 2018·4 cites·9 claims
- 5087US10057972B2Extreme ultraviolet light generation system and method of generating extreme ultraviolet lightGIGAPHOTON INC·Filed 2017·Granted Aug 21, 2018·5 cites·15 claims
Showing the top 50 of 705 patent records by PatentIndex Score.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →