Assignee
GILCHRIST ULYSSES
US5 patents
Top patents by PatentIndex Score
US8283813B2Oct 9, 2012
Robot drive with magnetic spindle bearings
GILCHRIST ULYSSES43 citations93
US8918203B2Dec 23, 2014
Substrate processing apparatus
GILCHRIST ULYSSES18 citations92
US8573919B2Nov 5, 2013
Substrate transport apparatus
GILCHRIST ULYSSES21 citations92
US8888433B2Nov 18, 2014
Reduced capacity carrier and method of use
GILCHRIST ULYSSES6 citations83
US8454293B2Jun 4, 2013
Substrate loading and unloading station with buffer
GILCHRIST ULYSSES4 citations60