Assignee
GLUKHOY YURI
US6 patents
Top patents by PatentIndex Score
US9484190B2Nov 1, 2016
Showerhead-cooler system of a semiconductor-processing chamber for semiconductor wafers of large area
GLUKHOY YURI23 citations91
US7967945B2Jun 28, 2011
RF antenna assembly for treatment of inner surfaces of tubes with inductively coupled plasma
GLUKHOY YURI48 citations89
US9273393B2Mar 1, 2016
Torch system for depositing protective coatings on interior walls and recesses present on the flat surface of an object
GLUKHOY YURI6 citations71
US9275840B2Mar 1, 2016
Method for providing uniform distribution of plasma density in a plasma treatment apparatus
GLUKHOY YURI5 citations71
US10730239B1Aug 4, 2020
3D printing apparatus using a beam of an atmospheric pressure inductively coupled plasma generator
GLUKHOY YURI7 citations61
US8062470B2Nov 22, 2011
Method and apparatus for application of thin coatings from plasma onto inner surfaces of hollow containers
GLUKHOY YURI0 citations36