Assignee
GODET LUDOVIC
US·21 granted patents·1 pending application·284 citations·filing 2009–2014
Top patents by PatentIndex Score
22 records- 0198US8815720B2Method of etching a workpieceGODET LUDOVIC·Filed 2012·Granted Aug 26, 2014·102 cites·9 claims
- 0297US8101510B2Plasma processing apparatusGODET LUDOVIC·Filed 2009·Granted Jan 24, 2012·50 cites·19 claims
- 0396US8133804B1Method and system for modifying patterned photoresist using multi-step ion implantationGODET LUDOVIC·Filed 2010·Granted Mar 13, 2012·35 cites·20 claims
- 0495US8698107B2Technique and apparatus for monitoring ion mass, energy, and angle in processing systemsGODET LUDOVIC·Filed 2011·Granted Apr 15, 2014·26 cites·14 claims
- 0594US8664098B2Plasma processing apparatusGODET LUDOVIC·Filed 2012·Granted Mar 4, 2014·7 cites·17 claims
- 0694US8460569B2Method and system for post-etch treatment of patterned substrate featuresGODET LUDOVIC·Filed 2011·Granted Jun 11, 2013·18 cites·7 claims
- 0793US8188445B2Ion sourceGODET LUDOVIC·Filed 2010·Granted May 29, 2012·15 cites·19 claims
- 0889US8603591B2Enhanced etch and deposition profile control using plasma sheath engineeringGODET LUDOVIC·Filed 2009·Granted Dec 10, 2013·8 cites·13 claims
- 0983US8435727B2Method and system for modifying photoresist using electromagnetic radiation and ion implantationGODET LUDOVIC·Filed 2010·Granted May 7, 2013·5 cites·18 claims
- 1082US8623171B2Plasma processing apparatusGODET LUDOVIC·Filed 2009·Granted Jan 7, 2014·6 cites·9 claims
- 1179US8778465B2Ion-assisted direct growth of porous materialsGODET LUDOVIC·Filed 2012·Granted Jul 15, 2014·2 cites·20 claims
- 1278US8728951B2Method and system for ion-assisted processingGODET LUDOVIC·Filed 2012·Granted May 20, 2014·1 cites·15 claims
- 1372US9136096B2Three dimensional metal deposition techniqueGODET LUDOVIC·Filed 2012·Granted Sep 15, 2015·4 cites·20 claims
- 1472US8778603B2Method and system for modifying substrate relief features using ion implantationGODET LUDOVIC·Filed 2011·Granted Jul 15, 2014·2 cites·10 claims
- 1568US8974683B2Method and system for modifying resist openings using multiple angled ionsGODET LUDOVIC·Filed 2011·Granted Mar 10, 2015·2 cites·15 claims
- 1663US9240350B2Techniques for forming 3D structuresGODET LUDOVIC·Filed 2012·Granted Jan 19, 2016·1 cites·11 claims
- 1755US9425027B2Methods of affecting material properties and applications thereforGODET LUDOVIC·Filed 2012·Granted Aug 23, 2016·0 cites·7 claims
- 1850US8969181B2Method for epitaxial layer overgrowthGODET LUDOVIC·Filed 2012·Granted Mar 3, 2015·0 cites·20 claims
- 1950US8835287B2Method of implanting a workpiece to improve growth of a compound semiconductorGODET LUDOVIC·Filed 2012·Granted Sep 16, 2014·0 cites·18 claims
- 2050US2012309180A1Method of forming a retrograde material profile using ion implantationGODET LUDOVIC·Filed 2012·Application pending·0 cites
- 2146US9520267B2Bias voltage frequency controlled angular ion distribution in plasma processingGODET LUDOVIC·Filed 2014·Granted Dec 13, 2016·0 cites·17 claims
- 2246US9024273B2Method to generate molecular ions from ions with a smaller atomic massGODET LUDOVIC·Filed 2010·Granted May 5, 2015·0 cites·5 claims
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