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GODYAK VALERY
US6 patents
Top patents by PatentIndex Score
US10083817B1Sep 25, 2018
Linear remote plasma source
GODYAK VALERY19 citations84
US8992725B2Mar 31, 2015
Plasma reactor with inductie excitation of plasma and efficient removal of heat from the excitation coil
GODYAK VALERY13 citations83
US8920600B2Dec 30, 2014
Inductive plasma source with high coupling efficiency
GODYAK VALERY13 citations83
US8444870B2May 21, 2013
Inductive plasma source with high coupling efficiency
GODYAK VALERY11 citations83
US7863582B2Jan 4, 2011
Ion-beam source
GODYAK VALERY13 citations83
US8487544B2Jul 16, 2013
Power splitter circuit for electrodeless lamp
GODYAK VALERY0 citations51