Assignee
GOEHNERMEIER AKSEL
DE·3 granted patents·10 citations·filing 2005–2011
Technology mixG03F3
Top patents by PatentIndex Score
3 records- 0181US8081295B2Projection exposure method and projection exposure system thereforGOEHNERMEIER AKSEL·Filed 2005·Granted Dec 20, 2011·6 cites·28 claims
- 0276US9110383B2Projection exposure method and projection exposure system thereforGOEHNERMEIER AKSEL·Filed 2011·Granted Aug 18, 2015·2 cites·25 claims
- 0366US9063439B2Projection objective for microlithography with stray light compensation and related methodsGOEHNERMEIER AKSEL·Filed 2009·Granted Jun 23, 2015·2 cites·40 claims
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