Assignee
GOMI ATSUSHI
JP·3 granted patents·1 pending application·5 citations·filing 2008–2011
Top patents by PatentIndex Score
4 records- 0171US8992686B2Mounting table structure, film forming apparatus and raw material recovery methodGOMI ATSUSHI·Filed 2011·Granted Mar 31, 2015·3 cites·41 claims
- 0264US8277889B2Film formation method and film formation apparatusGOMI ATSUSHI·Filed 2008·Granted Oct 2, 2012·2 cites·4 claims
- 0346US8408025B2Raw material recovery method and trapping mechanism for recovering raw materialGOMI ATSUSHI·Filed 2009·Granted Apr 2, 2013·0 cites·15 claims
- 0434US2012222782A1METHOD FOR FORMING Cu WIRINGGOMI ATSUSHI·Filed 2010·Application pending·0 cites
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