Assignee
GOSEN JEROEN GERARD
NL·3 granted patents·7 citations·filing 2010–2011
Top patents by PatentIndex Score
3 records- 0182US9013673B2Lithographic apparatus and device manufacturing methodGOSEN JEROEN GERARD·Filed 2010·Granted Apr 21, 2015·5 cites·23 claims
- 0271US8755026B2Lithographic apparatus and a device manufacturing methodGOSEN JEROEN GERARD·Filed 2010·Granted Jun 17, 2014·2 cites·21 claims
- 0342US8810769B2Lithographic apparatus, an illumination system, a projection system and a method of manufacturing a device using a lithographic apparatusGOSEN JEROEN GERARD·Filed 2011·Granted Aug 19, 2014·0 cites·20 claims
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