Assignee
GOTO TERUTAKA
JP·2 granted patents·7 citations·filing 2008–2010
Top patents by PatentIndex Score
2 records- 0172US8215175B2Quantitative evaluation device of atomic vacancies existing in silicon wafer, method for the device, silicon wafer manufacturing method, and thin-film oscillatorGOTO TERUTAKA·Filed 2008·Granted Jul 10, 2012·7 cites·11 claims
- 0227US8578777B2Method for quantitatively evaluating concentration of atomic vacancies existing in silicon wafer, method for manufacturing silicon wafer, and silicon wafer manufactured by the method for manufacturing silicon waferGOTO TERUTAKA·Filed 2010·Granted Nov 12, 2013·0 cites·6 claims
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