Assignee
GRAHAM ANDREW B
US·6 granted patents·12 citations·filing 2011–2012
Top patents by PatentIndex Score
6 records- 0188US8906730B2Method of forming membranes with modified stress characteristicsGRAHAM ANDREW B·Filed 2011·Granted Dec 9, 2014·8 cites·20 claims
- 0280US8673756B2Out-of-plane spacer defined electrodeGRAHAM ANDREW B·Filed 2011·Granted Mar 18, 2014·3 cites·9 claims
- 0362US8426289B2Wafer with spacer including horizontal memberGRAHAM ANDREW B·Filed 2011·Granted Apr 23, 2013·1 cites·20 claims
- 0449US8647930B2Wafer with recessed plugGRAHAM ANDREW B·Filed 2011·Granted Feb 11, 2014·0 cites·20 claims
- 0546US8878314B2MEMS package or sensor package with intra-cap electrical via and method thereofGRAHAM ANDREW B·Filed 2012·Granted Nov 4, 2014·0 cites·18 claims
- 0644US8580691B2Method of forming non-planar membranes using CMPGRAHAM ANDREW B·Filed 2011·Granted Nov 12, 2013·0 cites·16 claims
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