Assignee
GRANADOS AXEL AGUADO
US·2 granted patents·0 citations·filing 2011–2011
Technology mixG03F2
Top patents by PatentIndex Score
2 records- 0150US8536587B2Method and apparatus for measurement and control of photomask to substrate alignmentGRANADOS AXEL AGUADO·Filed 2011·Granted Sep 17, 2013·0 cites·21 claims
- 0250US8535393B2Method and apparatus for measurement and control of photomask to substrate alignmentGRANADOS AXEL AGUADO·Filed 2011·Granted Sep 17, 2013·0 cites·21 claims
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