Assignee
GRILL ALFRED
US4 patents
Top patents by PatentIndex Score
US8637412B2Jan 28, 2014
Process to form an adhesion layer and multiphase ultra-low k dielectric material using PECVD
GRILL ALFRED2 citations60
US8212337B2Jul 3, 2012
Advanced low k cap film formation process for nano electronic devices
GRILL ALFRED2 citations60
US8101150B2Jan 24, 2012
Control of carbon nanotube diameter using CVD or PECVD growth
GRILL ALFRED3 citations59
US8664109B2Mar 4, 2014
Advanced low k cap film formation process for nano electronic devices
GRILL ALFRED0 citations49