Assignee
GRIMBERGEN MICHAEL N
US·3 granted patents·7 citations·filing 2010–2012
Top patents by PatentIndex Score
3 records- 0185US9378930B2Inductively coupled plasma reactor having RF phase control and methods of use thereofGRIMBERGEN MICHAEL N·Filed 2010·Granted Jun 28, 2016·7 cites·14 claims
- 0243US8961804B2Etch rate detection for photomask etchingGRIMBERGEN MICHAEL N·Filed 2012·Granted Feb 24, 2015·0 cites·20 claims
- 0342US8778204B2Methods for reducing photoresist interference when monitoring a target layer in a plasma processGRIMBERGEN MICHAEL N·Filed 2011·Granted Jul 15, 2014·0 cites·20 claims
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