Assignee
GU YOUFAN
US4 patents
Top patents by PatentIndex Score
US8172197B2May 8, 2012
Fast-acting pneumatic diaphragm valve
GU YOUFAN28 citations85
US8671987B2Mar 18, 2014
Two-stage, slow-start valve apparatus
GU YOUFAN7 citations81
US8541716B2Sep 24, 2013
Heater control with high-limit thermal safety shutdown
GU YOUFAN9 citations79
US8679287B2Mar 25, 2014
Method and apparatus for preventing ALD reactants from damaging vacuum pumps
GU YOUFAN0 citations39