Assignee
GUNJI ISAO
JP·3 granted patents·1 citations·filing 2008–2012
Top patents by PatentIndex Score
3 records- 0158US8419856B2Substrate processing apparatusGUNJI ISAO·Filed 2012·Granted Apr 16, 2013·1 cites·9 claims
- 0246US8551565B2Film forming method and film forming apparatusGUNJI ISAO·Filed 2008·Granted Oct 8, 2013·0 cites·6 claims
- 0344US8562751B2Dry cleaning method of substrate processing apparatusGUNJI ISAO·Filed 2012·Granted Oct 22, 2013·0 cites·19 claims
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