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HADA HIDEO
JP4 patents
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Resist composition, method of forming resist pattern, novel compound, and acid generator
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Compound and method of producing the same, acid generator, resist composition and method of forming resist pattern
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Resist composition, method of forming resist pattern, novel compound, and acid generator
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US9040220B2May 26, 2015
Compound and method of producing the same, acid generator, resist composition and method of forming resist pattern
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