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HAEUSLER ALFRED

DE2 patents

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US8648432B2Feb 11, 2014

Fully embedded micromechanical device, system on chip and method for manufacturing the same

HAEUSLER ALFRED4 citations69

US8470679B2Jun 25, 2013

Semiconductor device including a deep contact and a method of manufacturing such a device

HAEUSLER ALFRED0 citations48