Assignee
HAIBARA TERUO
JP·4 granted patents·1 pending application·2 citations·filing 2009–2012
Top patents by PatentIndex Score
5 records- 0166US8575571B2Cleaning apparatus, measurement method and calibration methodHAIBARA TERUO·Filed 2012·Granted Nov 5, 2013·2 cites·7 claims
- 0250US8408221B2Micro bubble generating device and silicon wafer cleaning apparatusHAIBARA TERUO·Filed 2009·Granted Apr 2, 2013·0 cites·9 claims
- 0348US10121649B2Cleaning method of semiconductor waferHAIBARA TERUO·Filed 2009·Granted Nov 6, 2018·0 cites·10 claims
- 0439US8778085B2Dissolved nitrogen concentration monitoring method, substrate cleaning method, and substrate cleaning apparatusHAIBARA TERUO·Filed 2011·Granted Jul 15, 2014·0 cites·9 claims
- 0536US2013160791A1Ultrasonic cleaning methodHAIBARA TERUO·Filed 2012·Application pending·0 cites
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