Assignee
HAIMSON SHAI
2 granted patents·41 citations·filing 2008–2010
Top patents by PatentIndex Score
2 records- 0186US7803715B1Lithographic patterning for sub-90nm with a multi-layered carbon-based hardmaskHAIMSON SHAI·Filed 2008·Granted Sep 28, 2010·34 cites·20 claims
- 0278US8772155B2Filling cavities in semiconductor structures having adhesion promoting layer in the cavitiesHAIMSON SHAI·Filed 2010·Granted Jul 8, 2014·7 cites·6 claims
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