Assignee
HAMAMATSU AKIRA
JP·11 granted patents·1 pending application·35 citations·filing 2006–2012
Top patents by PatentIndex Score
12 records- 0192US8310665B2Inspecting method and inspecting apparatus for substrate surfaceHAMAMATSU AKIRA·Filed 2012·Granted Nov 13, 2012·9 cites·18 claims
- 0292US8144337B2Inspecting method and inspecting apparatus for substrate surfaceHAMAMATSU AKIRA·Filed 2009·Granted Mar 27, 2012·15 cites·15 claims
- 0386US8274651B2Method of inspecting a semiconductor device and an apparatus thereofHAMAMATSU AKIRA·Filed 2011·Granted Sep 25, 2012·3 cites·14 claims
- 0480US8654350B2Inspecting method and inspecting apparatus for substrate surfaceHAMAMATSU AKIRA·Filed 2012·Granted Feb 18, 2014·2 cites·10 claims
- 0579US8289507B2Method of apparatus for detecting particles on a specimenHAMAMATSU AKIRA·Filed 2011·Granted Oct 16, 2012·2 cites·12 claims
- 0679US8149396B2Defect inspection apparatus and its methodHAMAMATSU AKIRA·Filed 2011·Granted Apr 3, 2012·2 cites·10 claims
- 0775US8310666B2Apparatus of inspecting defect in semiconductor and method of the sameHAMAMATSU AKIRA·Filed 2011·Granted Nov 13, 2012·1 cites·12 claims
- 0872US8094295B2Inspection method and inspection apparatusHAMAMATSU AKIRA·Filed 2009·Granted Jan 10, 2012·1 cites·1 claims
- 0963US8269959B2Inspection method and inspection apparatusHAMAMATSU AKIRA·Filed 2012·Granted Sep 18, 2012·0 cites·7 claims
- 1062US8643834B2Apparatus of inspecting defect in semiconductor and method of the sameHAMAMATSU AKIRA·Filed 2012·Granted Feb 4, 2014·0 cites·12 claims
- 1156US8559000B2Method of inspecting a semiconductor device and an apparatus thereofHAMAMATSU AKIRA·Filed 2012·Granted Oct 15, 2013·0 cites·16 claims
- 1241US2006233434A1Method and apparatus for inspectionHAMAMATSU AKIRA·Filed 2006·Application pending·0 cites
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