Assignee
HAMPSHIRE INSTR INC
US·11 granted patents·342 citations·filing 1984–1990
Top patents by PatentIndex Score
11 records- 0187US4734923ALithographic system mask inspection deviceHAMPSHIRE INSTR INC·Filed 1986·Granted Mar 29, 1988·47 cites·50 claims
- 0286US4700371ALong life x-ray source targetHAMPSHIRE INSTR INC·Filed 1984·Granted Oct 13, 1987·44 cites·20 claims
- 0385US4870668AGap sensing/adjustment apparatus and method for a lithography machineHAMPSHIRE INSTR INC·Filed 1987·Granted Sep 26, 1989·61 cites·24 claims
- 0484US4872189ATarget structure for x-ray lithography systemHAMPSHIRE INSTR INC·Filed 1987·Granted Oct 3, 1989·58 cites·17 claims
- 0573US4969169AX-ray lithography systemHAMPSHIRE INSTR INC·Filed 1988·Granted Nov 6, 1990·31 cites·53 claims
- 0670US4980896AX-ray lithography systemHAMPSHIRE INSTR INC·Filed 1989·Granted Dec 25, 1990·32 cites·28 claims
- 0766US4896341ALong life X-ray source targetHAMPSHIRE INSTR INC·Filed 1987·Granted Jan 23, 1990·23 cites·7 claims
- 0847US5197089APin chuck for lithography systemHAMPSHIRE INSTR INC·Filed 1990·Granted Mar 23, 1993·21 cites·15 claims
- 0947US4860328ATarget positioning for minimum debrisHAMPSHIRE INSTR INC·Filed 1987·Granted Aug 22, 1989·17 cites·29 claims
- 1041US4837793AMass limited targetHAMPSHIRE INSTR INC·Filed 1987·Granted Jun 6, 1989·8 cites·51 claims
- 1130US5165094APartially constrained minimum energy state controllerHAMPSHIRE INSTR INC·Filed 1990·Granted Nov 17, 1992·0 cites·13 claims
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