Assignee
HANSEN STEVEN GEORGE
US·5 granted patents·62 citations·filing 2007–2012
Top patents by PatentIndex Score
5 records- 0197US8786824B2Source-mask optimization in lithographic apparatusHANSEN STEVEN GEORGE·Filed 2010·Granted Jul 22, 2014·38 cites·20 claims
- 0296US9213783B2Source mask optimization to reduce stochastic effectsHANSEN STEVEN GEORGE·Filed 2012·Granted Dec 15, 2015·22 cites·27 claims
- 0367US8982324B2Polarization designs for lithographic apparatusHANSEN STEVEN GEORGE·Filed 2010·Granted Mar 17, 2015·1 cites·20 claims
- 0459US8576377B2Lithographic apparatus and device manufacturing methodHANSEN STEVEN GEORGE·Filed 2007·Granted Nov 5, 2013·1 cites·29 claims
- 0538US9563135B2Process tuning with polarizationHANSEN STEVEN GEORGE·Filed 2011·Granted Feb 7, 2017·0 cites·19 claims
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