Assignee
HARA KENICHI
JP·1 granted patent·2 pending applications·0 citations·filing 2006–2011
Top patents by PatentIndex Score
3 records- 0141US8770138B2Semiconductor manufacturing apparatus and semiconductor manufacturing methodHARA KENICHI·Filed 2011·Granted Jul 8, 2014·0 cites·9 claims
- 0238US2007148972A1Method of repairing seed layer for damascene interconnectsHARA KENICHI·Filed 2006·Application pending·0 cites
- 0332US2013203260A1Etching method and etching apparatusHARA KENICHI·Filed 2011·Application pending·0 cites
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