Assignee
HARA MASAMICHI
JP5 patents
Top patents by PatentIndex Score
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Deposition device
HARA MASAMICHI6 citations71
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Substrate mounting mechanism, and substrate processing apparatus
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Film forming apparatus and film forming method
HARA MASAMICHI2 citations61
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Method for film formation, apparatus for film formation, and computer-readable recording medium
HARA MASAMICHI0 citations51
US8273409B2Sep 25, 2012
Method for film formation, apparatus for film formation, and computer-readable recording medium
HARA MASAMICHI0 citations51