Assignee

HARPHAM ANDREW JOHN

GB·2 granted patents·14 citations·filing 2008–2011

Technology mixB01D2 G03F2

Top patents by PatentIndex Score

2 records

0188US8830440B2Vacuum system for immersion photolithographyHARPHAM ANDREW JOHN·Filed 2011·Granted Sep 9, 2014·5 cites·22 claims
0283US8164734B2Vacuum system for immersion photolithographyHARPHAM ANDREW JOHN·Filed 2008·Granted Apr 24, 2012·9 cites·20 claims

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