Assignee
HARUMOTO MASAHIKO
JP·4 granted patents·1 pending application·69 citations·filing 2007–2013
Top patents by PatentIndex Score
5 records- 0197US9375748B2Substrate processing apparatus and substrate processing methodHARUMOTO MASAHIKO·Filed 2013·Granted Jun 28, 2016·59 cites·17 claims
- 0294US8781308B2Apparatus for and method of heat-treating film formed on surface of substrateHARUMOTO MASAHIKO·Filed 2011·Granted Jul 15, 2014·6 cites·8 claims
- 0373US8956695B2Developing methodHARUMOTO MASAHIKO·Filed 2012·Granted Feb 17, 2015·2 cites·8 claims
- 0468US8137576B2Substrate developing method and developing apparatusHARUMOTO MASAHIKO·Filed 2008·Granted Mar 20, 2012·2 cites·11 claims
- 0545US2008025823A1Load lock device, and substrate processing apparatus and substrate processing system including the sameHARUMOTO MASAHIKO·Filed 2007·Application pending·0 cites
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