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HASHII TOMOHIRO

JP2 patents

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US8092277B2Jan 10, 2012

Method of grinding semiconductor wafers, grinding surface plate, and grinding device

HASHII TOMOHIRO4 citations56
US9550264B2Jan 24, 2017

Fixed abrasive-grain processing device, method of fixed abrasive-grain processing, and method for producing semiconductor wafer

HASHII TOMOHIRO0 citations35