Assignee
HASHIMOTO MASAHIRO
JP10 patents
Top patents by PatentIndex Score
US8637213B2Jan 28, 2014
Mask blank and transfer mask
HASHIMOTO MASAHIRO5 citations84
US8940462B2Jan 27, 2015
Photomask blank, photomask, method of manufacturing the same, and method of manufacturing a semiconductor device
HASHIMOTO MASAHIRO7 citations83
US9075319B2Jul 7, 2015
Mask blank and transfer mask
HASHIMOTO MASAHIRO2 citations62
US8658334B2Feb 25, 2014
Transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device
HASHIMOTO MASAHIRO2 citations62
US8409772B2Apr 2, 2013
Mask blank and method of manufacturing a transfer mask
HASHIMOTO MASAHIRO2 citations60
US8404407B2Mar 26, 2013
Mask blank, mask blank manufacturing method, transfer mask, and transfer mask manufacturing method
HASHIMOTO MASAHIRO3 citations55
US8663876B2Mar 4, 2014
Photomask blank, method of manufacturing the same, photomask, and method of manufacturing the same
HASHIMOTO MASAHIRO0 citations52
US8323858B2Dec 4, 2012
Photomask blank, photomask, and methods of manufacturing the same
HASHIMOTO MASAHIRO0 citations52
US8785086B2Jul 22, 2014
Reflective mask blank, method of manufacturing the same, and reflective mask
HASHIMOTO MASAHIRO0 citations45
US8197993B2Jun 12, 2012
Method of manufacturing transfer mask and method of manufacturing semiconductor device
HASHIMOTO MASAHIRO0 citations41