Assignee
HATANO MASAYUKI
JP·5 granted patents·3 pending applications·4 citations·filing 2008–2012
Top patents by PatentIndex Score
8 records- 0174US8973494B2Imprint method and imprint apparatusHATANO MASAYUKI·Filed 2011·Granted Mar 10, 2015·2 cites·20 claims
- 0264US8906281B2Imprint method, imprinting equipment, and method for manufacturing semiconductor deviceHATANO MASAYUKI·Filed 2012·Granted Dec 9, 2014·1 cites·10 claims
- 0360US8901012B2Semiconductor manufacturing apparatus and method for manufacturing semiconductor deviceHATANO MASAYUKI·Filed 2012·Granted Dec 2, 2014·1 cites·20 claims
- 0449US8180472B2Control method for semiconductor manufacturing apparatus, control system for semiconductor manufacturing apparatus, and manufacturing method for semiconductor deviceHATANO MASAYUKI·Filed 2009·Granted May 15, 2012·0 cites·17 claims
- 0547US2010136796A1Substrate holding member, immersion type exposure device and method of fabricating semiconductor deviceHATANO MASAYUKI·Filed 2009·Application pending·0 cites
- 0645US2008218715A1Immersion exposure method of and immersion exposure apparatus for making exposure in a state where the space between the projection lens and substrate to be processed is filled with a liquidHATANO MASAYUKI·Filed 2008·Application pending·0 cites
- 0742US8118585B2Pattern formation method and a method for manufacturing a semiconductor deviceHATANO MASAYUKI·Filed 2010·Granted Feb 21, 2012·0 cites·18 claims
- 0838US2010304280A1Method of forming a template, and method of manufacturing a semiconductor device using the templateHATANO MASAYUKI·Filed 2010·Application pending·0 cites
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