Assignee
HAUKKA SUVI
FI·3 granted patents·2 pending applications·473 citations·filing 2005–2012
Top patents by PatentIndex Score
5 records- 0198US8846502B2Methods for depositing thin films comprising gallium nitride by atomic layer depositionHAUKKA SUVI·Filed 2012·Granted Sep 30, 2014·470 cites·35 claims
- 0274US8592294B2High temperature atomic layer deposition of dielectric oxidesHAUKKA SUVI·Filed 2010·Granted Nov 26, 2013·3 cites·17 claims
- 0355US10707082B2Methods for depositing thin films comprising indium nitride by atomic layer depositionHAUKKA SUVI·Filed 2012·Granted Jul 7, 2020·0 cites·26 claims
- 0449US2007054048A1Extended deposition range by hot spotsHAUKKA SUVI·Filed 2005·Application pending·0 cites
- 0539US2012263876A1Deposition of silicon dioxide on hydrophobic surfacesHAUKKA SUVI·Filed 2012·Application pending·0 cites
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