Assignee
HAWRYLCHAK LARA
US·4 granted patents·2 pending applications·32 citations·filing 2008–2013
Top patents by PatentIndex Score
6 records- 0194US8580092B2Adjustable process spacing, centering, and improved gas conductanceHAWRYLCHAK LARA·Filed 2011·Granted Nov 12, 2013·14 cites·9 claims
- 0290US8133368B2Encapsulated sputtering targetHAWRYLCHAK LARA·Filed 2008·Granted Mar 13, 2012·14 cites·24 claims
- 0387US8435392B2Encapsulated sputtering targetHAWRYLCHAK LARA·Filed 2012·Granted May 7, 2013·4 cites·20 claims
- 0453US10020187B2Apparatus and methods for backside passivationHAWRYLCHAK LARA·Filed 2013·Granted Jul 10, 2018·0 cites·10 claims
- 0549US2013087452A1Process kit for rf physical vapor depositionHAWRYLCHAK LARA·Filed 2012·Application pending·0 cites
- 0647US2012042825A1Extended life deposition ringHAWRYLCHAK LARA·Filed 2011·Application pending·0 cites
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