Assignee
HAWRYLUK ANDREW M
US·9 granted patents·2 pending applications·122 citations·filing 1989–2012
Top patents by PatentIndex Score
11 records- 0193US5003567ASoft x-ray reduction camera for submicron lithographyHAWRYLUK ANDREW M·Filed 1989·Granted Mar 26, 1991·102 cites·33 claims
- 0287US8153930B1Apparatus and methods for improving the intensity profile of a beam image used to process a substrateHAWRYLUK ANDREW M·Filed 2009·Granted Apr 10, 2012·8 cites·19 claims
- 0380US8742286B1Apparatus and method for improving the intensity profile of a beam image used to process a substrateHAWRYLUK ANDREW M·Filed 2012·Granted Jun 3, 2014·3 cites·3 claims
- 0476US8299446B2Sub-field enhanced global alignmentHAWRYLUK ANDREW M·Filed 2010·Granted Oct 30, 2012·6 cites·20 claims
- 0567US8765493B2Methods of characterizing semiconductor light-emitting devices based on product wafer characteristicsHAWRYLUK ANDREW M·Filed 2012·Granted Jul 1, 2014·1 cites·22 claims
- 0664US8796151B2Systems for and methods of laser-enhanced plasma processing of semiconductor materialsHAWRYLUK ANDREW M·Filed 2012·Granted Aug 5, 2014·1 cites·18 claims
- 0764US8796053B2Photolithographic LED fabrication using phase-shift maskHAWRYLUK ANDREW M·Filed 2010·Granted Aug 5, 2014·1 cites·19 claims
- 0851US9190570B2Laser annealing of GaN LEDs with reduced pattern effectsHAWRYLUK ANDREW M·Filed 2012·Granted Nov 17, 2015·0 cites·15 claims
- 0949US2009114630A1Minimization of surface reflectivity variationsHAWRYLUK ANDREW M·Filed 2007·Application pending·0 cites
- 1047US2012223062A1Minimization of Surface ReflectivityHAWRYLUK ANDREW M·Filed 2012·Application pending·0 cites
- 1145US9341951B2Wynn-dyson imaging system with reduced thermal distortionHAWRYLUK ANDREW M·Filed 2012·Granted May 17, 2016·0 cites·20 claims
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