Assignee
HAYAMI TOSHIHIRO
JP·4 granted patents·8 citations·filing 2004–2008
Top patents by PatentIndex Score
4 records- 0152US8628640B2Plasma processing unit and high-frequency electric power supplying unitHAYAMI TOSHIHIRO·Filed 2004·Granted Jan 14, 2014·3 cites·25 claims
- 0249US8286581B2High frequency power source and its control method, and plasma processing apparatusHAYAMI TOSHIHIRO·Filed 2004·Granted Oct 16, 2012·5 cites·5 claims
- 0346US8771461B2Plasma processing apparatusHAYAMI TOSHIHIRO·Filed 2008·Granted Jul 8, 2014·0 cites·20 claims
- 0445US8852388B2Plasma processorHAYAMI TOSHIHIRO·Filed 2008·Granted Oct 7, 2014·0 cites·2 claims
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