Assignee
HAYASHI HIROMI
JP·2 granted patents·1 pending application·9 citations·filing 2010–2011
Top patents by PatentIndex Score
3 records- 0189US8748078B2Cyclic compound, process for preparation thereof, radiation-sensitive composition, and method for formation of resist patternHAYASHI HIROMI·Filed 2010·Granted Jun 10, 2014·6 cites·18 claims
- 0276US8829247B2Cyclic compound, method of producing the same, radiation sensitive composition, and method of forming resist patternHAYASHI HIROMI·Filed 2010·Granted Sep 9, 2014·3 cites·7 claims
- 0336US2013004894A1Under coat film material and method of forming multilayer resist patternHAYASHI HIROMI·Filed 2011·Application pending·0 cites
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