Assignee
HAZELTON ANDREW J
JP·5 granted patents·30 citations·filing 2007–2012
Top patents by PatentIndex Score
5 records- 0195US8089610B2Environmental system including vacuum scavenge for an immersion lithography apparatusHAZELTON ANDREW J·Filed 2007·Granted Jan 3, 2012·13 cites·40 claims
- 0294US8456610B2Environmental system including vacuum scavenge for an immersion lithography apparatusHAZELTON ANDREW J·Filed 2009·Granted Jun 4, 2013·11 cites·45 claims
- 0386US8836914B2Environmental system including vacuum scavenge for an immersion lithography apparatusHAZELTON ANDREW J·Filed 2012·Granted Sep 16, 2014·2 cites·43 claims
- 0483US8508718B2Wafer table having sensor for immersion lithographyHAZELTON ANDREW J·Filed 2008·Granted Aug 13, 2013·4 cites·29 claims
- 0561US8810768B2Environmental system including vacuum scavenge for an immersion lithography apparatusHAZELTON ANDREW J·Filed 2010·Granted Aug 19, 2014·0 cites·86 claims
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