Assignee
HE QIYANG
CN·4 granted patents·21 citations·filing 2011–2012
Top patents by PatentIndex Score
4 records- 0190US8952297B2Reaction apparatus for processing wafer, electrostatic chuck and wafer temperature control methodHE QIYANG·Filed 2012·Granted Feb 10, 2015·13 cites·21 claims
- 0279US8450167B2Method of fabricating semiconductor devicesHE QIYANG·Filed 2011·Granted May 28, 2013·5 cites·18 claims
- 0369US8673707B2Method for forming metal gateHE QIYANG·Filed 2011·Granted Mar 18, 2014·3 cites·17 claims
- 0436US8741744B2Method of forming a gate pattern and a semiconductor deviceHE QIYANG·Filed 2011·Granted Jun 3, 2014·0 cites·18 claims
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