Assignee
HEIDEN MICHAEL
DE4 patents
Top patents by PatentIndex Score
US8582113B2Nov 12, 2013
Device for determining the position of at least one structure on an object, use of an illumination apparatus with the device and use of protective gas with the device
HEIDEN MICHAEL3 citations60
US8390927B2Mar 5, 2013
Element for homogenizing the illumination with simultaneous setting of the polarization degree
HEIDEN MICHAEL3 citations60
US8305587B2Nov 6, 2012
Apparatus for the optical inspection of wafers
HEIDEN MICHAEL4 citations60
US8102541B2Jan 24, 2012
Apparatus and method for measuring structures on a mask and or for calculating structures in a photoresist resulting from the structures
HEIDEN MICHAEL0 citations50