Assignee
HERRIN RUSSELL T
US·3 granted patents·66 citations·filing 2010–2011
Top patents by PatentIndex Score
3 records- 0197US9330856B2Methods of manufacture for micro-electro-mechanical system (MEMS)HERRIN RUSSELL T·Filed 2010·Granted May 3, 2016·29 cites·14 claims
- 0297US8956903B2Planar cavity MEMS and related structures, methods of manufacture and design structuresHERRIN RUSSELL T·Filed 2010·Granted Feb 17, 2015·37 cites·22 claims
- 0337US8796058B2Semiconductor structureHERRIN RUSSELL T·Filed 2011·Granted Aug 5, 2014·0 cites·17 claims
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