Assignee
HESS CARL
US4 patents
Top patents by PatentIndex Score
US8151220B2Apr 3, 2012
Methods for simulating reticle layout data, inspecting reticle layout data, and generating a process for inspecting reticle layout data
HESS CARL9 citations82
US8810646B2Aug 19, 2014
Focus offset contamination inspection
HESS CARL1 citations49
US9208552B2Dec 8, 2015
Method and system for hybrid reticle inspection
HESS CARL0 citations44
US8914754B2Dec 16, 2014
Database-driven cell-to-cell reticle inspection
HESS CARL0 citations33