Assignee
HIGASHI GREGG
US5 patents
Top patents by PatentIndex Score
US9175393B1Nov 3, 2015
Tiled showerhead for a semiconductor chemical vapor deposition reactor
HIGASHI GREGG16 citations83
US9136422B1Sep 15, 2015
Texturing a layer in an optoelectronic device for improved angle randomization of light
HIGASHI GREGG8 citations81
US9212422B2Dec 15, 2015
CVD reactor with gas flow virtual walls
HIGASHI GREGG3 citations62
US9982346B2May 29, 2018
Movable liner assembly for a deposition zone in a CVD reactor
HIGASHI GREGG0 citations51
US9644268B2May 9, 2017
Thermal bridge for chemical vapor deposition reactors
HIGASHI GREGG0 citations41