Assignee
HIGASHIKI TATSUHIKO
JP·1 granted patent·2 pending applications·0 citations·filing 2005–2009
Top patents by PatentIndex Score
3 records- 0153US8174669B2Liquid immersion optical tool, method for cleaning liquid immersion optical tool, liquid immersion exposure method and method for manufacturing semiconductor deviceHIGASHIKI TATSUHIKO·Filed 2009·Granted May 8, 2012·0 cites·12 claims
- 0246US2007039637A1Liquid immersion optical tool, method for cleaning liquid immersion optical tool, liquid immersion exposure method and method for manufacturing semiconductor deviceHIGASHIKI TATSUHIKO·Filed 2006·Application pending·0 cites
- 0340US2006050351A1Liquid immersion optical tool, method for cleaning liquid immersion optical tool, and method for manufacturing semiconductor deviceHIGASHIKI TATSUHIKO·Filed 2005·Application pending·0 cites
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