Assignee
HIGASHISAKA RYUJI
JP·2 granted patents·1 citations·filing 2011–2011
Top patents by PatentIndex Score
2 records- 0155US9200362B2Substrate holder stocker device, substrate processing apparatus, and substrate holder moving method using the substrate holder stocker deviceHIGASHISAKA RYUJI·Filed 2011·Granted Dec 1, 2015·1 cites·7 claims
- 0235US9997386B2Substrate holder mounting device and substrate holder container chamberHIGASHISAKA RYUJI·Filed 2011·Granted Jun 12, 2018·0 cites·7 claims
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