Assignee
HIRAYAMA YUSUKE
JP·3 granted patents·5 citations·filing 2006–2012
Top patents by PatentIndex Score
3 records- 0171US8975188B2Plasma etching methodHIRAYAMA YUSUKE·Filed 2012·Granted Mar 10, 2015·4 cites·6 claims
- 0260US8821683B2Substrate processing apparatus and method, and program and storage mediumHIRAYAMA YUSUKE·Filed 2006·Granted Sep 2, 2014·1 cites·9 claims
- 0351US8558134B2Plasma processing apparatus and plasma processing methodHIRAYAMA YUSUKE·Filed 2009·Granted Oct 15, 2013·0 cites·16 claims
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