Assignee
HIROI TAKASHI
JP·4 granted patents·5 pending applications·24 citations·filing 2002–2011
Top patents by PatentIndex Score
9 records- 0191US8421010B2Charged particle beam device for scanning a sample using a charged particle beam to inspect the sampleHIROI TAKASHI·Filed 2009·Granted Apr 16, 2013·16 cites·10 claims
- 0268US8121395B2Inspection apparatus and an inspection method for inspecting a circuit patternHIROI TAKASHI·Filed 2009·Granted Feb 21, 2012·3 cites·4 claims
- 0365US8111902B2Method and apparatus for inspecting defects of circuit patternsHIROI TAKASHI·Filed 2006·Granted Feb 7, 2012·4 cites·12 claims
- 0460US8509516B2Circuit pattern examining apparatus and circuit pattern examining methodHIROI TAKASHI·Filed 2009·Granted Aug 13, 2013·1 cites·13 claims
- 0547US2008002876A1Method and its apparatus for inspecting a patternHIROI TAKASHI·Filed 2007·Application pending·0 cites
- 0638US2007131877A9Pattern inspection method and system thereforHIROI TAKASHI·Filed 2002·Application pending·0 cites
- 0738US2013271595A1Circuit pattern inspecting device and inspecting method thereofHIROI TAKASHI·Filed 2011·Application pending·0 cites
- 0837US2013082177A1Circuit pattern inspection apparatus and circuit pattern inspection methodHIROI TAKASHI·Filed 2011·Application pending·0 cites
- 0934US2011298915A1Pattern inspecting apparatus and pattern inspecting methodHIROI TAKASHI·Filed 2010·Application pending·0 cites
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