Assignee
HIROSE YOSHIRO
JP·4 granted patents·24 citations·filing 2011–2012
Top patents by PatentIndex Score
4 records- 0189US9165761B2Method for manufacturing semiconductor device, method for processing substrate, substrate processing apparatus and recording mediumHIROSE YOSHIRO·Filed 2012·Granted Oct 20, 2015·9 cites·20 claims
- 0289US9018104B2Method for manufacturing semiconductor device, method for processing substrate and substrate processing apparatusHIROSE YOSHIRO·Filed 2011·Granted Apr 28, 2015·8 cites·16 claims
- 0386US8546272B2Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatusHIROSE YOSHIRO·Filed 2011·Granted Oct 1, 2013·6 cites·9 claims
- 0465US9378943B2Method of manufacturing semiconductor device, method of processing substrate substrate processing apparatus and non-transitory computer-readable recording mediumHIROSE YOSHIRO·Filed 2012·Granted Jun 28, 2016·1 cites·14 claims
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